光路長増倍装置

Optical path length multiplier

Abstract

【課題】光路長の増倍を容易に可能にする光路長増倍装置を実現する。 【解決手段】レーザ干渉測長機100において、光路長増倍装置101における複数の偏光ビームスプリッタの数を1つ増やすことにより、固定平面ミラー31と移動平面ミラー32との間の1往復分に相当する光路長を増倍することを可能にし、特に、光路長増倍装置101において、複数の偏光ビームスプリッタ(11〜1m)、1/4波長板21,22、固定平面ミラー31、移動平面ミラー32などの光学部材の配置構成を規則的かつ単純にすることによって、偏光ビームスプリッタの数を増やすという構成変更を容易にし、光路長の増倍を容易に行うことを可能にした。 【選択図】図1
<P>PROBLEM TO BE SOLVED: To materialize an optical path length multiplier for easily multiplying an optical path length. <P>SOLUTION: As to a laser interference length measuring instrument 100, the number of a plurality of polarizing beam splitters in this optical path length multiplier 101 is increased by one, thereby making it possible to multiply an optical path length equating with one round trip between a fixed plane mirror 31 and a movable plane mirror 32. As to this length multiplier 101 in particular, a constitution alteration for increasing the number of polarizing beam splitters is facilitated while it is made possible to facilitate the multiplication of an optical path length by making regular and simple the arrangement/constitution of optical members such as the beam splitters 11 to 1 m, quarter wavelength plates 21 and 22, and the plane mirrors 31 and 32. <P>COPYRIGHT: (C)2010,JPO&INPIT

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